发明公开
- 专利标题: FLEXURE-BASED CONTINUOUS EJECTOR PIN MECHANISM FOR MINI/MICRO CHIP MASS TRANSFER
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申请号: US18062025申请日: 2022-12-06
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公开(公告)号: US20230268205A1公开(公告)日: 2023-08-24
- 发明人: Xin CHEN , Zhihang LIN , Hui TANG , Hongcheng LI , Jian GAO , Qiang LIU , Xun CHEN
- 申请人: GUANGDONG UNIVERSITY OF TECHNOLOGY
- 申请人地址: CN Guangzhou
- 专利权人: GUANGDONG UNIVERSITY OF TECHNOLOGY
- 当前专利权人: GUANGDONG UNIVERSITY OF TECHNOLOGY
- 当前专利权人地址: CN Guangzhou
- 优先权: CN 2210152777.4 2022.02.18
- 主分类号: H01L21/67
- IPC分类号: H01L21/67 ; H01L33/00
摘要:
A flexure-based continuous ejector pin mechanism for Mini/Micro chip mass transfer includes a first drive frame, a second drive frame, a mounting base, a first thorn die attach drive device, a second thorn die attach drive device, first flexible hinges, second flexible hinges, and a pricking pin. The second drive frame and the first drive frame are connected through the first flexible hinge. The mounting base is connected to a left side and a right side of the second drive frame through the second flexible hinges. Compared with a laser transfer technology, the flexible movable thorn die attach device has lower cost and higher accuracy; compared with a vacuum nozzle transfer technology, the flexible movable thorn die attach device has higher transfer efficiency and quality; and compared with a conventional thorn die attach device, the flexible movable thorn die attach device has higher transfer efficiency and precision.
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