- 专利标题： High Damage Threshold and Highly Reliable Broad-band Mid-IR Coatings for High Power Fluoride Fiber Laser
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申请号： US17691537申请日： 2022-03-10
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公开(公告)号： US20230287557A1公开(公告)日： 2023-09-14
- 发明人: Yimin Hu , Feng Niu , Wei Lu
- 申请人： Yimin Hu , Feng Niu , Wei Lu
- 申请人地址： US MD Clarksville
- 专利权人： Yimin Hu,Feng Niu,Wei Lu
- 当前专利权人： Yimin Hu,Feng Niu,Wei Lu
- 当前专利权人地址： US MD Clarksville
- 主分类号： C23C14/30
- IPC分类号： C23C14/30 ; C23C14/08 ; C23C28/00
摘要：
This invention provides a process or fabrication method of forming broadband anti-reflective (AR) coating over the mid-IR fluoride fiber for high power laser applications in mid-IR wavelength range. The AR coating consists of multiple-pair Lithium fluoride (LiF) and Al2O3, and was deposited by electron beam physical vapor deposition with an iron assistant source at low temperature (
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