- 专利标题: IMAGE SENSOR HAVING AN IMPROVED STRUCTURE FOR SMALL PIXEL DESIGNS
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申请号: US17832905申请日: 2022-06-06
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公开(公告)号: US20230307479A1公开(公告)日: 2023-09-28
- 发明人: Yen-Yu Chen , Yen-Ting Chiang , Bai-Tao Huang , Tse-Hua Lu , Tzu-Hsuan Hsu , Shyh-Fann Ting , Jen-Cheng Liu , Dun-Nian Yaung
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 主分类号: H01L27/146
- IPC分类号: H01L27/146
摘要:
Various embodiments of the present disclosure are directed towards an image sensor. The image sensor includes a substrate having a first side and a second side. The substrate includes a pixel region. A photodetector is in the pixel region. A first doped region is in the pixel region. A second doped region is in the pixel region. The second doped region is vertically between the first doped region and the first side of the substrate. A doped well is in the substrate and laterally surrounds the pixel region. The doped well is partially in the second doped region. A portion of the second doped region is vertically between the doped well and the second side of the substrate. A trench isolation structure is in the semiconductor substrate and laterally surrounds the pixel region. A footprint of the trench isolation structure is within a footprint of the doped well.
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