- 专利标题: STEP SUBSTRATE COATING COMPOSITION
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申请号: US18025780申请日: 2021-09-02
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公开(公告)号: US20230350299A1公开(公告)日: 2023-11-02
- 发明人: Yuki MITSUTAKE , Hayato HATTORI , Tomotada HIROHARA
- 申请人: NISSAN CHEMICAL CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: NISSAN CHEMICAL CORPORATION
- 当前专利权人: NISSAN CHEMICAL CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP 20155549 2020.09.16
- 国际申请: PCT/JP2021/032321 2021.09.02
- 进入国家日期: 2023-03-10
- 主分类号: G03F7/11
- IPC分类号: G03F7/11 ; C08F138/00 ; H01L21/311
摘要:
A step substrate coating composition for efficiently forming a coating that is capable of filling and flattening a pattern. A step substrate coating composition comprising a compound (A) of a main agent, a crosslinking agent, and a solvent, the compound (A) including a partial structure expressed by formula (A-1) (where the broken line represents bonding with an aromatic ring, the aromatic ring forming a polymer skeleton or a monomer, and n represents an integer of 1-4).
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