- 专利标题: METAL-INSULATOR-METAL CAPACITOR WITHIN METALLIZATION STRUCTURE
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申请号: US17395779申请日: 2021-08-06
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公开(公告)号: US20230037867A1公开(公告)日: 2023-02-09
- 发明人: Chi-Han Yang , Lung-Hui Chen , Kuan-Yu Chen , Shih J. Wei
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 主分类号: H01L29/94
- IPC分类号: H01L29/94 ; H01L23/522 ; H01L49/02
摘要:
A metallization structure of an integrated circuit (IC) includes: an intermetal dielectric (IMD) layer; a patterned metal layer embedded in the IMD layer; a patterned top metal layer disposed on the IMD layer; electrical vias comprising via material passing through the IMD layer and connecting the patterned top metal layer and the patterned metal layer embedded in the IMD layer; and a metal-insulator-metal (MIM) capacitor. The MIM capacitor includes: a first capacitor metal layer comprising the via material contacting an MIM capacitor landing area of the patterned metal layer embedded in the IMD layer; a second capacitor metal layer comprising the via material contacting a first MIM capacitor terminal area of the patterned top metal layer; and an insulator layer disposed between the first capacitor metal layer and the second capacitor metal layer.
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