Invention Publication
- Patent Title: SELF-ALIGNED ETCHING TECHNIQUES FOR MEMORY FORMATION
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Application No.: US17804997Application Date: 2022-06-01
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Publication No.: US20230395704A1Publication Date: 2023-12-07
- Inventor: John Hopkins , Jordan D. Greenlee
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L27/1157 ; H01L29/792

Abstract:
Methods, systems, and devices for self-aligned etching techniques for memory formation are described. A memory device may include a stack of alternating materials and a pillar extending through the stack of alternating materials, where the stack of alternating materials and the pillar may form a set of multiple memory cells. A polysilicon material may be formed above the pillar, where the polysilicon material may be associated with a selector device for the memory cells. A masking material may be formed above the polysilicon material and the stack of alternating materials, where the masking material may be aligned with the polysilicon material and may have a width that is greater than a width of the polysilicon material and the pillar. The masking material may prevent the polysilicon material, the pillar, and a portion of the stack of alternating materials beneath the masking material from being removed during an etching operation.
Information query
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