发明申请
- 专利标题： TRANSFER OBJECT
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申请号： US17937779申请日： 2022-10-04
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公开(公告)号： US20230045020A1公开(公告)日： 2023-02-09
- 发明人: Kazuhiko NODA , Katsuhiro DOI , Asahiko NOGAMI , Kyoko SAKURAI
- 申请人： Dexerials Corporation
- 申请人地址： JP Shimotsuke-shi
- 专利权人： Dexerials Corporation
- 当前专利权人： Dexerials Corporation
- 当前专利权人地址： JP Shimotsuke-shi
- 优先权： JP2018-177767 20180921,JP2019-055111 20190322
- 主分类号： B26D3/10
- IPC分类号： B26D3/10 ; B23B5/48 ; B23B29/12
摘要：
A transfer object comprises a substrate having one or more fine concave portions formed on a surface thereof. At least one of a sidewall and a bottom of each fine concave portion has an oscillation waveform satisfying at least one of the following oscillation waveform conditions: the oscillation waveform is continuous; the oscillation waveform is a composite waveform of a plurality of oscillation waveforms, and the plurality of oscillation waveforms are in phase with each other; fine concave portions of a plurality of rows are formed on the substrate, and oscillation waveforms of adjacent fine concave portions are in phase with each other; and fine concave portions of a plurality of rows are formed on the substrate, and oscillation waveforms of the fine concave portions are in phase with each other for every two pitches.
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