- 专利标题: MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME
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申请号: US17975241申请日: 2022-10-27
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公开(公告)号: US20230051615A1公开(公告)日: 2023-02-16
- 发明人: Nam Jae LEE
- 申请人: SK hynix Inc.
- 申请人地址: KR Icheon-si Gyeonggi-do
- 专利权人: SK hynix Inc.
- 当前专利权人: SK hynix Inc.
- 当前专利权人地址: KR Icheon-si Gyeonggi-do
- 优先权: KR10-2019-0123129 20191004
- 主分类号: H01L27/11582
- IPC分类号: H01L27/11582 ; H01L27/11573 ; H01L27/11565
摘要:
A memory device and a method of manufacturing the memory device includes a stacked structure having a cell region and a slimming region. The memory device also includes a plurality of vertical channel structures each including memory cells and vertically passing through the stacked structure in the cell region. The memory device further includes a plurality of support structures each having a structure of each of the vertical channel structures and vertically passing through the stacked structure in the slimming region. The plurality of support structures have different heights depending on the shape of the stacked structure in the slimming region.
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