- 专利标题: PACKAGE STRUCTURE AND MANUFACTURING METHOD THEREOF
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申请号: US17401276申请日: 2021-08-12
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公开(公告)号: US20230051881A1公开(公告)日: 2023-02-16
- 发明人: Cheng-Yen Hsieh , Chih-Horng Chang , Chung-Yu Lu
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 主分类号: H01L23/38
- IPC分类号: H01L23/38 ; H01L25/065 ; H01L23/498 ; H01L23/48 ; H01L35/34
摘要:
A package structure is provided. The package structure includes a semiconductor die and a thermoelectric structure disposed on the semiconductor die. The thermoelectric structure includes P-type semiconductor blocks, N-type semiconductor blocks and metal pads. The P-type semiconductor blocks and the N-type semiconductor blocks are arranged in alternation with the metal pads connecting the P-type semiconductor blocks and the N-type semiconductor blocks. When a current flowing through one of the N-type semiconductor block, one of the metal pad, and one of the P-type semiconductor block in order, the metal pad between the N-type semiconductor block and the P-type semiconductor block forms a cold junction which absorbs heat generated by the semiconductor die.
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