Invention Application
- Patent Title: LASER PROCESSING DEVICE AND LASER PROCESSING METHOD
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Application No.: US17795309Application Date: 2021-01-18
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Publication No.: US20230086426A1Publication Date: 2023-03-23
- Inventor: Katsuhiro KOREMATSU , Takeshi SAKAMOTO
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu-shi, Shizuoka
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu-shi, Shizuoka
- Priority: JP2020-011690 20200128
- International Application: PCT/JP2021/001509 WO 20210118
- Main IPC: B23K26/06
- IPC: B23K26/06

Abstract:
A laser processing apparatus emits a laser light with a part of a focusing region being on an object to form a modified region along a virtual plane inside the object. The laser processing apparatus includes a support portion, an emission portion that emits the laser light onto the object, a moving mechanism that moves at least one of the support portion and the emission portion so that the part of the focusing region moves along the virtual plane inside the object, and a controller. The emission portion includes a shaping portion that shapes the laser light such that the shape of the part of the focusing region in a plane perpendicular to an optical axis of the laser light has a longitudinal direction. The longitudinal direction is a direction intersecting the direction of movement of the part of the focusing region.
Information query
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