DEPOSITION APPARATUS AND DEPOSITION PRODUCT MANUFACTURING METHOD
摘要:
A deposition apparatus includes: discharge nozzles arranged at predetermined intervals in a processing compartment in a deposition chamber, wherein each of the discharge nozzles comprises a discharge port that discharges aerosolized particulates toward a corresponding surface treatment object; linear motor single-axis robots arranged at predetermined intervals in a direction perpendicular to a nozzle arrangement direction; and nozzle head units that each adjust a mutual distance between the discharge port and a surface of the corresponding surface treatment object based on a shape of the corresponding surface treatment object, the nozzle head units moving along the nozzle arrangement direction, and the nozzle head units being arranged in each of the linear motor single-axis robots.
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