An industrial process field device includes an active component, a switch, a switch monitor, and a controller. The active component may be a sensor configured to sense a process parameter, or a control device configured to control a process of the industrial process. The switch is electrically coupled to first and second terminals. The switch monitor is configured to detect an open or closed state of the switch, and generate a first state output, a second state output, or a chattering state output. An anti-chatter circuit outputs a chatter stabilized state output based on the chattering state output. The controller is configured to set the switch in the open or closed state, and generate a notification based on any one of the first and second state outputs and the chatter stabilized state output that indicates at least one of the current state and a condition of the switch.