- 专利标题: TECHNIQUES FOR MANUFACTURING A DOUBLE ELECTRODE MEMORY ARRAY
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申请号: US17499709申请日: 2021-10-12
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公开(公告)号: US20230113960A1公开(公告)日: 2023-04-13
- 发明人: Anna Maria Conti , Andrea Gotti , Pavan Reddy K. Aella
- 申请人: Micron Technology, Inc.
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 主分类号: H01L27/24
- IPC分类号: H01L27/24 ; H01L45/00
摘要:
Methods, systems, and devices for techniques for manufacturing a double electrode memory array are described. A memory device may be fabricated using a sequence of fabrication steps that include depositing a first stack of materials including a conductive layer, an interface layer, and a first electrode layer. The first stack of materials may be etched to form a first set of trenches. A second stack of materials may be deposited on top of the first stack of materials. The second stack may include a second electrode layer in contact with the first electrode layer, a storage layer, and a third electrode layer. The second stack of materials may be etched to form a second set of trenches above the first set of trenches, and filled with a sealing layer and a dielectric material. The sealing layer may not extend substantially into the first set of trenches.
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