Invention Application
- Patent Title: DEVICE WITH DUAL ISOLATION STRUCTURE
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Application No.: US17504051Application Date: 2021-10-18
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Publication No.: US20230117591A1Publication Date: 2023-04-20
- Inventor: Richard J. RASSEL , Johnatan A. KANTAROVSKY , Zhong-Xiang HE , Mark D. LEVY , Michel J. ABOU-KHALIL
- Applicant: GLOBALFOUNDRIES U.S. Inc.
- Applicant Address: US NY Malta
- Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee Address: US NY Malta
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/778 ; H01L29/66

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to a semiconductor device with a dual isolation structure and methods of manufacture. The structure includes: a dual isolation structure including semiconductor material; and an active device region including a channel material and a gate metal material over the channel material. The channel material is between the dual isolation structure and the gate metal material includes a bottom surface not extending beyond a sidewall of the dual isolation structure.
Information query
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