DEVICE WITH DUAL ISOLATION STRUCTURE
Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to a semiconductor device with a dual isolation structure and methods of manufacture. The structure includes: a dual isolation structure including semiconductor material; and an active device region including a channel material and a gate metal material over the channel material. The channel material is between the dual isolation structure and the gate metal material includes a bottom surface not extending beyond a sidewall of the dual isolation structure.
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