- 专利标题: SPECTRAL FEATURE CONTROL APPARATUS
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申请号: US18081971申请日: 2022-12-15
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公开(公告)号: US20230124587A1公开(公告)日: 2023-04-20
- 发明人: Eric Anders Mason
- 申请人: Cymer, LLC
- 申请人地址: US CA San Diego
- 专利权人: Cymer, LLC
- 当前专利权人: Cymer, LLC
- 当前专利权人地址: US CA San Diego
- 主分类号: G02B27/42
- IPC分类号: G02B27/42 ; G01J3/06 ; G01J3/14 ; G01J3/18 ; G03F7/20 ; H01S3/08 ; G02B26/00 ; H01L21/027 ; H01S3/00 ; H01S3/23
摘要:
A spectral feature selection apparatus includes a dispersive optical element arranged to interact with a pulsed light beam; three or more refractive optical elements arranged in a path of the pulsed light beam between the dispersive optical element and a pulsed optical source; and one or more actuation systems, each actuation system associated with a refractive optical element and configured to rotate the associated refractive optical element to thereby adjust a spectral feature of the pulsed light beam. At least one of the actuation systems is a rapid actuation system that includes a rapid actuator configured to rotate its associated refractive optical element about a rotation axis. The rapid actuator includes a rotary stepper motor having a rotation shaft that rotates about a shaft axis that is parallel with the rotation axis of the associated refractive optical element.
公开/授权文献
- US12124053B2 Spectral feature control apparatus 公开/授权日:2024-10-22
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