Invention Application
- Patent Title: MEMS GYROSCOPE HAVING QUADRATURE COMPENSATION ELECTRODES AND METHOD FOR COMPENSATING A QUADRATURE ERROR
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Application No.: US18048370Application Date: 2022-10-20
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Publication No.: US20230135941A1Publication Date: 2023-05-04
- Inventor: Gabriele GATTERE , Manuel RIANI , Carlo VALZASINA
- Applicant: STMICROELECTRONICS S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.r.l.
- Current Assignee: STMICROELECTRONICS S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Priority: IT102021000027764 20211029
- Main IPC: G01C19/5712
- IPC: G01C19/5712 ; B81B3/00

Abstract:
The present disclosure is directed to a MEMS gyroscope formed by a substrate and a movable mass suspended on the substrate and configured to carry out a movement in a driving direction and in a detection direction perpendicular to each other. The movable mass has a first face and a second face opposite to the first face. The gyroscope also has a first and a second quadrature compensation electrode group, fixed to the substrate and capacitively coupled to the movable mass. The first quadrature compensation electrode group faces the first face of the movable mass, and the second quadrature compensation electrode group faces the second face of the movable mass. The first and the second quadrature compensation electrode groups each have a respective variable facing area on the movable mass as a result of the movement of the movable mass in the driving direction and are configured to exert an electrostatic force on the movable mass during the movement of the movable mass in the driving direction.
Information query