Invention Publication
- Patent Title: Load-Lock Gauge
-
Application No.: US18475515Application Date: 2023-09-27
-
Publication No.: US20240019332A1Publication Date: 2024-01-18
- Inventor: Gerardo A. Brucker
- Applicant: MKS Instruments, Inc.
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Main IPC: G01L21/12
- IPC: G01L21/12 ; G01L9/00 ; B81B3/00 ; G01L27/00 ; G01L13/02

Abstract:
A load lock pressure gauge comprises a housing configured to be coupled to a load lock vacuum chamber. The housing supports an absolute vacuum pressure sensor that provides instantaneous high vacuum pressure signal over a range of high vacuum pressures and a differential diaphragm pressure sensor that provides an instantaneous differential pressure signal between load lock pressure and ambient pressure. The housing further supports an absolute ambient pressure sensor. A low vacuum absolute pressure is computed from the instantaneous differential pressure signal and the instantaneous ambient pressure signal. A controller in the housing is able to recalibrate the differential diaphragm pressure sensor based on measured voltages of the sensor and a measured ambient pressure during normal operation of the pressure gauge with routine cycling of pressure in the load lock.
Public/Granted literature
- US12055452B2 Load-lock gauge Public/Granted day:2024-08-06
Information query