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公开(公告)号：US20240118158A1
公开(公告)日：2024-04-11
申请号：US18045685
申请日：2022-10-11
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Scott C. Heinbuch , Timothy C. Swinney
IPC: G01L21/12
CPC classification number: G01L21/12
Abstract: A thermal conductivity gauge implements a model of power dissipation to accurately measure gas pressure. An envelope surrounds a gas volume, and a sensor wire is positioned within the gas volume. The controller provides a model of power dissipation from the thermal conductivity gauge, including power loss due to conductive heat loss from sensor wire end contacts, radiative loss from the sensor wire toward the gas envelope, and pressure dependent conductive heat loss from the sensor wire through surrounding gas. The controller then applies a power input to the sensor wire to heat the sensor wire, and measures total power dissipation WT, sensor wire temperature Ts, and envelope temperature Te during the application of the power input. Gas pressure within the envelope is determined based on the measured WT, Ts and Te and the model of power dissipation.
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公开(公告)号：US20240019332A1
公开(公告)日：2024-01-18
申请号：US18475515
申请日：2023-09-27
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker
CPC classification number: G01L21/12 , G01L9/0055 , B81B3/0018 , G01L27/005 , G01L13/025 , B81B2201/0264
Abstract: A load lock pressure gauge comprises a housing configured to be coupled to a load lock vacuum chamber. The housing supports an absolute vacuum pressure sensor that provides instantaneous high vacuum pressure signal over a range of high vacuum pressures and a differential diaphragm pressure sensor that provides an instantaneous differential pressure signal between load lock pressure and ambient pressure. The housing further supports an absolute ambient pressure sensor. A low vacuum absolute pressure is computed from the instantaneous differential pressure signal and the instantaneous ambient pressure signal. A controller in the housing is able to recalibrate the differential diaphragm pressure sensor based on measured voltages of the sensor and a measured ambient pressure during normal operation of the pressure gauge with routine cycling of pressure in the load lock.
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公开(公告)号：US20220155172A1
公开(公告)日：2022-05-19
申请号：US17453450
申请日：2021-11-03
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Timothy C. Swinney
Abstract: A Process Critical Thermal Conductivity Gauge (PCTCG) instrument relies on gauge chamber wall above-ambient-temperature-control (AATC) to provide improved accuracy and thermal stability with reduced and linearized temperature coefficients. A sensor resistor is exposed to gas pressure in a gauge chamber. AATC is provided by control of a heater that heats a chamber wall to control temperature difference between the sensor resistor and chamber wall. An example application of this technology is to end-point detection in lyophilization where the TCG is used to track partial pressures of water in binary gas mixtures.
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公开(公告)号：US09714919B2
公开(公告)日：2017-07-25
申请号：US14384782
申请日：2013-03-13
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Timothy C. Swinney , G. Jeffery Rathbone
CPC classification number: G01N27/64 , G01N1/405 , G01N27/60 , H01J49/06 , H01J49/162 , H01J49/4245
Abstract: A method of detecting specific gas species in an ion trap, the specific gas species initially being a trace component of a first low concentration in the volume of gas, includes ionizing the gas including the specific gas species, thereby creating specific ion species. The method further includes producing an electrostatic potential in which the specific ion species are confined in the ion trap to trajectories. The method also includes exciting confined specific ion species with an AC excitation source having an excitation frequency, scanning the excitation frequency of the AC excitation source to eject the specific ion species from the ion trap, and detecting the ejected specific ion species. The method further includes increasing the concentration of the specific ion species within the ion trap relative to the first low concentration prior to scanning the excitation frequency that ejects the ions of the specific gas species.
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5.发明申请Devices And Methods For Feedthrough Leakage Current Detection And Decontamination In Ionization Gauges 审中-公开漏电流检测和离子化测量中的去污设备及方法公开(公告)号：US20170010171A1
公开(公告)日：2017-01-12
申请号：US14795706
申请日：2015-07-09
Applicant: MKS Instruments, Inc.
Inventor： Stephen C. Blouch , Paul C. Arnold , Gerardo A. Brucker , Wesley J. Graba , Douglas C. Hansen
IPC: G01L21/32
Abstract: Devices and corresponding methods can be provided to test an ionization gauge, such as a hot cathode ionization gauge, for leakage currents and to respond to the leakage currents to improve pressure measurement accuracy. Responding to the leakage current can include applying a correction to a pressure measurement signal generated by the gauge based on the leakage current. Responding to the leakage current can also include removing contamination causing the leakage current, where the contamination is on electrical feedthrough insulators or other gauge surfaces. Testing and correcting for leakage currents and removing contamination can be completed with the ionization pressure gauge in situ in its environment of use, and while the gauge remains under vacuum.
Abstract translation: 可以提供装置和相应的方法来测试电离计，例如热阴极电离计，用于泄漏电流，并响应泄漏电流以提高压力测量精度。 响应于泄漏电流可以包括对基于泄漏电流的量规产生的压力测量信号应用校正。 响应泄漏电流还可以包括去除污染导致漏电流的污染物，其中污染物位于电气馈通绝缘子或其他表面上。 泄漏电流和去除污染物的测试和纠正可以在其使用环境中使用电离压力表原位完成，而仪表保持在真空状态。
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Patent Agency Ranking
公开(公告)号：US20150091579A1
公开(公告)日：2015-04-02
申请号：US14500820
申请日：2014-09-29
Applicant: MKS Instruments, Inc,
Inventor： Gerardo A. Brucker , Timothy C. Swinney , Brandon J. Kelly
CPC classification number: G01L21/34 , G01L19/06 , H01J9/50 , H01J41/06 , Y02W30/828 , Y10T29/49007
Abstract: A cold cathode ionization vacuum gauge includes an extended anode electrode and a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode. The vacuum gauge further includes an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current, and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode.
Abstract translation: 冷阴极电离真空计包括延伸的阳极电极和沿其长度包围阳极电极的阴极电极，并在阳极电极和阴极电极之间形成放电空间。 真空计进一步包括导电保护环电极，其围绕阳极电极的底部插入在阴极电极和阳极电极之间以收集泄漏电流;以及放电启动器装置，设置在保护环电极上并与保护环电极电连接， 启动器装置具有指向阳极的多个尖端并且在尖端和阳极之间形成间隙。
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公开(公告)号：US12123794B2
公开(公告)日：2024-10-22
申请号：US18045685
申请日：2022-10-11
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Scott C. Heinbuch , Timothy C. Swinney
IPC: G01L21/12
CPC classification number: G01L21/12
Abstract: A thermal conductivity gauge implements a model of power dissipation to accurately measure gas pressure. An envelope surrounds a gas volume, and a sensor wire is positioned within the gas volume. The controller provides a model of power dissipation from the thermal conductivity gauge, including power loss due to conductive heat loss from sensor wire end contacts, radiative loss from the sensor wire toward the gas envelope, and pressure dependent conductive heat loss from the sensor wire through surrounding gas. The controller then applies a power input to the sensor wire to heat the sensor wire, and measures total power dissipation WT, sensor wire temperature Ts, and envelope temperature Te during the application of the power input. Gas pressure within the envelope is determined based on the measured WT, Ts and Te and the model of power dissipation.
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公开(公告)号：US11808643B2
公开(公告)日：2023-11-07
申请号：US17453450
申请日：2021-11-03
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Timothy C. Swinney
CPC classification number: G01L21/12 , G01L11/002 , G01L21/14
Abstract: A Process Critical Thermal Conductivity Gauge (PCTCG) instrument relies on gauge chamber wall above-ambient-temperature-control (AATC) to provide improved accuracy and thermal stability with reduced and linearized temperature coefficients. A sensor resistor is exposed to gas pressure in a gauge chamber. AATC is provided by control of a heater that heats a chamber wall to control temperature difference between the sensor resistor and chamber wall. An example application of this technology is to end-point detection in lyophilization where the TCG is used to track partial pressures of water in binary gas mixtures.
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公开(公告)号：US20210208016A1
公开(公告)日：2021-07-08
申请号：US16953923
申请日：2020-11-20
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Timothy C. Swinney
Abstract: A thermal conductivity gauge measures gas pressure within a chamber. A sensor wire and a resistor form a circuit coupled between a power input and ground, where the sensor wire extends into the chamber and connects to the resistor via a terminal. A controller adjusts the power input, as a function of a voltage at the terminal and a voltage at the power input, to bring the sensor wire to a target temperature. Based on the adjusted power input, the controller can determine a measure of the gas pressure within the chamber.
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公开(公告)号：US20210096035A1
公开(公告)日：2021-04-01
申请号：US17119804
申请日：2020-12-11
Applicant: MKS Instruments, Inc.
Inventor： Brandon J. Kelly , Clinton L. Percy , Scott C. Heinbuch , Gerardo A. Brucker , Timothy C. Swinney , Timothy R. Piwonka-Corle
Abstract: A gauge having a housing formed of a polymer material and one or more electrical feedthrough pins disposed in the housing. The electrical feedthrough pins can be oriented substantially perpendicular to each other and have complex shapes.
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