Invention Publication
- Patent Title: RESONATOR, LINEAR ACCELERATOR CONFIGURATION AND ION IMPLANTATION SYSTEM HAVING ROTATING EXCITER
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Application No.: US18373128Application Date: 2023-09-26
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Publication No.: US20240032183A1Publication Date: 2024-01-25
- Inventor: Costel BILOIU , David T. BLAHNIK , Wai-Ming TAM , Charles T. CARLSON , Frank SINCLAIR
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: H05H7/02
- IPC: H05H7/02 ; H05H7/12 ; H05H9/00
Abstract:
An exciter for a high frequency resonator. The exciter may include an exciter coil inner portion, extending along an exciter axis, an exciter coil loop, disposed at a distal end of the exciter coil inner portion. The exciter may also include a drive mechanism, including at least a rotation component to rotate the exciter coil loop around the exciter axis.
Public/Granted literature
- US12144101B2 Resonator, linear accelerator configuration and ion implantation system having rotating exciter Public/Granted day:2024-11-12
Information query
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