- 专利标题: METHOD FOR SETTING GAP BETWEEN CATHODE AND FILAMENT
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申请号: US17876812申请日: 2022-07-29
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公开(公告)号: US20240038490A1公开(公告)日: 2024-02-01
- 发明人: Steven T. Drummond , Joshua Max Abeshaus
- 申请人: Axcelis Technologies, Inc.
- 申请人地址: US MA Beverly
- 专利权人: Axcelis Technologies, Inc.
- 当前专利权人: Axcelis Technologies, Inc.
- 当前专利权人地址: US MA Beverly
- 主分类号: H01J37/317
- IPC分类号: H01J37/317 ; H01J37/075
摘要:
A cathode apparatus for an ion source has a cathode with a positioning feature and a blind hole. A cathode holder has an aperture defined by a thru-hole and a locating feature defined along an aperture axis. The thru-hole receives the cathode along the aperture axis in first and second alignment positions based on a rotational orientation of the positioning feature with respect to the locating feature. The first alignment position locates the cathode at a first axial position along the aperture axis. The second alignment position locates the cathode at a second axial position along the axial axis. A filament device has a filament clamp, a filament rod defining a filament axis, and a filament coupled to the filament rod. The filament clamp is in selective engagement with the filament rod to selectively position the filament along the filament axis within the blind hole.
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