公开(公告)号：US20240395494A1

公开(公告)日：2024-11-28

申请号：US18694081

申请日：2022-09-20

Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE

Inventor： Katsumi NAGAOKA ,  Takashi AIZAWA ,  Shun-ichiro OHMI

IPC: H01J37/075 ,  H01J9/04 ,  H01J37/26

Abstract: The purpose of the present invention, relating to lanthanide boride, which is known as a low work function material, is to provide a novel low work function material with low chemical reactivity, in particular a low work function material of which the material surface, after being exposed to atmospheric gases, can be cleaned at a heating temperature lower than in the prior art. The present invention is a laminate containing a lanthanide boride film formed on a substrate, the surface of said film being covered by a thin film, wherein the thin film is a monatomic layer of a hexagonal boron nitride thin film.

公开(公告)号：US20240242941A1

公开(公告)日：2024-07-18

申请号：US18618264

申请日：2024-03-27

Applicant: HAMAMATSU PHOTONICS K.K. ,  ENERGETIQ TECHNOLOGY, INC.

Inventor： Akio Suzuki ,  Toru Fujita ,  Akinori Asai ,  Yusei Nagata ,  Shinichi Ohba ,  Matthew Partlow ,  Ron Collins ,  Stephen F. Horne ,  Laura Owens

IPC: H01J37/32 ,  H01J37/075 ,  H05H1/00 ,  C23C16/455

CPC classification number: H01J37/32513 ,  H01J37/075 ,  H01J37/32009 ,  H05H1/00 ,  H05H1/01 ,  C23C16/45544

Abstract: A light emitting sealed body includes a housing which stores a discharge gas and is provided with a first opening to which first light is incident and a second opening from which second light is emitted, a first window portion which includes a first window member allowing the first light to be transmitted therethrough and hermetically seals the first opening, and a second window portion which includes a second window member allowing the second light to be transmitted therethrough and hermetically seals the second opening. Each of the first window member and the second window member is hermetically fixed to the housing by a joining material. A protection layer which covers the joining material is provided at at least one of a first joining position between the first window member and the housing and a second joining position between the second window member and the housing.

公开(公告)号：US11894211B2

公开(公告)日：2024-02-06

申请号：US17621503

申请日：2019-07-02

Applicant: Hitachi High-Tech Corporation

Inventor： Erina Kawamoto ,  Soichiro Matsunaga ,  Souichi Katagiri ,  Keigo Kasuya ,  Takashi Doi ,  Tetsuya Sawahata ,  Minoru Yamazaki

IPC: H01J37/077 ,  H01J37/075 ,  H01J37/18

CPC classification number: H01J37/077 ,  H01J37/075 ,  H01J37/18 ,  H01J2237/006

Abstract: The invention provides an electron beam apparatus that reduces a time required for an electron gun chamber to which a sputter ion pump and a non-evaporable getter pump are connected to reach an extreme high vacuum state. The electron beam apparatus includes an electron gun configured to emit an electron beam and the electron gun chamber to which the sputter ion pump and the non-evaporable getter pump are connected. The electron beam apparatus further includes a gas supply unit configured to supply at least one of hydrogen, oxygen, carbon monoxide, and carbon dioxide to the electron gun chamber.

公开(公告)号：US11887805B2

公开(公告)日：2024-01-30

申请号：US17491039

申请日：2021-09-30

Applicant: FEI Company

Inventor： John Stiller ,  Aaron Torok ,  Kevin Kagarice

IPC: H01J37/075 ,  H01J37/21 ,  H01J37/073

CPC classification number: H01J37/075 ,  H01J37/21 ,  H01J2237/06316

Abstract: Electron sources can include an electron source crystal coupled in series between opposing electrically conductive supports to form an electrically conductive path, wherein the electrical resistance of each of the electrically conductive supports is lower than the electrical resistance of the electron source crystal. Electron source crystals can include an emitting end and opposing shank end, wherein the shank end includes opposing leg portions. Electrically conductive supports can include foil supports spaced apart across a gap, wherein each of the opposing leg portions is attached to a respective foil support such that the foil supports are electrically connected to form the electrically conductive path. Particle focusing system are also disclosed. Electron sources can include an electron source crystal having an emitting end and opposing shank end, wherein the shank end is formed of a pair of opposing leg portions. Methods of manufacturing and operating electron sources are also disclosed.

公开(公告)号：US20230330751A1

公开(公告)日：2023-10-19

申请号：US17761864

申请日：2020-09-23

Applicant: Freemelt AB

Inventor： Ulric LJUNGBLAD ,  Robin STEPHANSEN

IPC: B33Y30/00 ,  H01J37/075 ,  B22F12/41 ,  H01J37/305

CPC classification number: B22F12/41 ,  B33Y30/00 ,  H01J37/075 ,  H01J37/305

Abstract: A metal 3D printer, a cathode holder system, a carrier for an electron emitter, and an electron source piece with a thermal break in a mechanical interface are provided. The metal 3D printer has an electron gun adapted to direct an electron beam generated by a back heated electron emitter of a cathode arrangement onto a metal material via an anode arrangement. The back heated electron emitter is capable of emitting electrons via thermionic emission from an emitting surface when heated on a back surface, and includes a side surface, essentially perpendicular to the emitting surface, between the emitting surface and the back surface. The metal 3D printer 100 includes: an electron source piece, including the electron emitter attached to a carrier in such a way that the carrier covers the side surface of the electron emitter adjoining the emitting surface; a cathode holder system including one or more cathode holder system members adapted to hold the electron source piece in a position in relation to an anode arrangement; and a first thermal break in a first mechanical interface adapted to mate an emitter holder of the cathode holder system with the electron source piece.

公开(公告)号：US20230101787A1

公开(公告)日：2023-03-30

申请号：US17491039

申请日：2021-09-30

Applicant: FEI Company

Inventor： John Stiller ,  Aaron Torok ,  Kevin Kagarice

IPC: H01J37/075 ,  H01J37/21

Abstract: Electron sources can include an electron source crystal coupled in series between opposing electrically conductive supports to form an electrically conductive path, wherein the electrical resistance of each of the electrically conductive supports is lower than the electrical resistance of the electron source crystal. Electron source crystals can include an emitting end and opposing shank end, wherein the shank end includes opposing leg portions. Electrically conductive supports can include foil supports spaced apart across a gap, wherein each of the opposing leg portions is attached to a respective foil support such that the foil supports are electrically connected to form the electrically conductive path. Particle focusing system are also disclosed. Electron sources can include an electron source crystal having an emitting end and opposing shank end, wherein the shank end is formed of a pair of opposing leg portions. Methods of manufacturing and operating electron sources are also disclosed.

公开(公告)号：US20230040534A1

公开(公告)日：2023-02-09

申请号：US17970410

申请日：2022-10-20

Applicant: Varian Medical Systems, Inc.

Inventor： Mark Everett Trail ,  James Edward Clayton

IPC: A61N5/10 ,  H01J37/073 ,  H01J35/14 ,  H01J35/06 ,  H01J37/075 ,  H05H9/00

Abstract: Presented systems and methods facilitate efficient and effective monitoring of particle beams. In some embodiments, a radiation gun system comprises: a particle beam gun that generates a particle beam, and a gun control component that controls the gun particle beam generation characteristics, including particle beam fidelity characteristics. The particle beam characteristics can be compatible with FLASH radiation therapy. Resolution control of the particle beam generation can enable dose delivery at an intra-pulse level and micro-bunch level. The micro-bunch can include individual bunches per each 3 GHz RF cycle within the 5 to 15 μsec pulse-width. The FLASH radiation therapy dose delivery can have a bunch level resolution of approximately 4.4×10{circumflex over ( )}-6 cGy/bunch.

公开(公告)号：US11380511B2

公开(公告)日：2022-07-05

申请号：US16828571

申请日：2020-03-24

Applicant: FEI Company

Inventor： Kun Liu ,  Steven J. Randolph

IPC: H01J37/075 ,  H01J37/28

Abstract: A charged particle beam source, such as for use in an electron microscope, can include an electrically conductive support member coupled to a base, a mounting member coupled to the support member and defining a bore, and an emitter member received in the bore and retained by a fixative material layer flowed around the emitter member in the bore.

公开(公告)号：US20220199350A1

公开(公告)日：2022-06-23

申请号：US17604373

申请日：2020-10-13

Applicant: Photo electron Soul Inc.

Inventor： Tomohiro NISHITANI

IPC: H01J37/075 ,  H01J37/12 ,  H01J37/28

Abstract: An object is to provide an electron beam applicator suitable for an electron gun having a photocathode and an electron beam emission method in the electron beam applicator. The object can be achieved by an electron beam applicator including: an electron gun section; a main body section; and a control unit. The electron gun section includes a light source, a photocathode that emits an electron beam in response to receiving excitation light emitted from the light source, and an anode. The main body section includes an objective lens that converges an electron beam emitted from the electron gun section. The control unit controls at least convergence power of the objective lens in accordance with a size of an electron beam emitted from the photocathode.

公开(公告)号：US11291103B2

公开(公告)日：2022-03-29

申请号：US16598144

申请日：2019-10-10

Applicant: Government of the United States of America, as represented by the Secretary of Commerce

Inventor： Stephen Paul Eckel ,  Daniel Schaeder Barker ,  James Anthony Fedchak ,  Julia Kay Scherschligt ,  Eric Burton Norrgard ,  Nikolai Nikolaevich Klimov

IPC: H05H3/02 ,  H01J37/075 ,  H01J37/08 ,  G02B27/42

Abstract: A uniaxial counter-propagating monolaser atom trap cools and traps atoms with a single a laser beam and includes: an atom slower that slows atoms to form slowed atoms; an optical diffractor including: a first diffraction grating that receives primary light and produces first reflected light; a second diffraction grating that receives primary light and produces second reflected light; and a third diffraction grating that receives the primary light and produces third reflected light; and a trapping region that forms trap light from the reflected lights and receives slowed atoms to produce trapped atoms from the slowed atoms that interact with the trap light.