发明公开
- 专利标题: Substrate Storage Container
-
申请号: US18377053申请日: 2023-10-05
-
公开(公告)号: US20240038561A1公开(公告)日: 2024-02-01
- 发明人: Osamu Ogawa , Seiya Nakarai
- 申请人: Shin-Etsu Polymer Co., Ltd.
- 申请人地址: JP Tokyo
- 专利权人: Shin-Etsu Polymer Co., Ltd.
- 当前专利权人: Shin-Etsu Polymer Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 优先权: JP 21065011 2021.04.06
- 主分类号: H01L21/673
- IPC分类号: H01L21/673
摘要:
A substrate storage container includes a container body configured to store a substrate, a lid that closes the opening of the container body, a retainer that is attached to the lid, and a substrate support portion formed in the retainer. The substrate support portion has an arc shape in a cross-sectional view from the top-to-bottom direction perpendicular to the closing direction of the lid. The substrate support portion includes a pair of left and right substrate support portions configured to hold the substrate together with the container body to retain the substrate.
信息查询
IPC分类: