Substrate Storage Container
    1.
    发明公开

    公开(公告)号:US20240038561A1

    公开(公告)日:2024-02-01

    申请号:US18377053

    申请日:2023-10-05

    IPC分类号: H01L21/673

    CPC分类号: H01L21/67383

    摘要: A substrate storage container includes a container body configured to store a substrate, a lid that closes the opening of the container body, a retainer that is attached to the lid, and a substrate support portion formed in the retainer. The substrate support portion has an arc shape in a cross-sectional view from the top-to-bottom direction perpendicular to the closing direction of the lid. The substrate support portion includes a pair of left and right substrate support portions configured to hold the substrate together with the container body to retain the substrate.