Invention Publication
- Patent Title: DUAL ROBOT INCLUDING SPLAYED END EFFECTORS AND SYSTEMS AND METHODS INCLUDING SAME
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Application No.: US18490137Application Date: 2023-10-19
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Publication No.: US20240042595A1Publication Date: 2024-02-08
- Inventor: Karuppasamy Muthukamatchi , Jeffrey C. Hudgens , Damon K. Cox
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Priority: IN 1941022652 2019.06.07
- The original application number of the division: US16850590 2020.04.16
- Main IPC: B25J9/04
- IPC: B25J9/04 ; B25J9/06 ; B25J17/02 ; B25J9/00 ; H01L21/677

Abstract:
A method of transporting substrates within an electronic device processing system includes rotating a first upper arm of a first arm assembly of a robot. The rotating causes a first end effector of the first arm assembly to move along a first path. The first arm assembly includes the first upper arm, a first forearm, a first wrist member, and the first end effector configured to support a first substrate. The method further includes rotating a second upper arm of a second arm assembly of the robot. The rotating causes a second end effector of the second arm assembly to move along a second path. The second arm assembly includes the second upper arm, a second forearm, a second wrist member, and the second end effector configured to support a second substrate. The second substrate does not overlap with the first substrate in any operating position of the end effectors.
Information query
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