Invention Publication
- Patent Title: AUTOMATIC PRESSURE CONTROL DEVICE, FILM FORMING APPARATUS AND PRESSURE CONTROL METHOD
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Application No.: US18233243Application Date: 2023-08-11
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Publication No.: US20240052950A1Publication Date: 2024-02-15
- Inventor: Satoshi YONEKURA , Tamaki TAKEYAMA , Tatsuhiko TANIMURA , Shigeyuki OKURA
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Priority: JP 22129020 2022.08.12
- Main IPC: F16K39/02
- IPC: F16K39/02 ; G05D16/16

Abstract:
An automatic pressure control device that controls a pressure in a processing container to which a source gas for forming a film on a substrate is supplied, includes: a vacuum exhauster configured to vacuum-exhaust a gas in the processing container; an exhaust path connecting the processing container and the vacuum exhauster; and a butterfly valve including an annular valve seat having an inner wall surface and a valve body configured as a plate-shaped body. The valve body is rotatably installed to the valve seat via a shaft and configured to change an opening area of the exhaust path by being arranged to be inclined and changing an inclination angle of the valve body. The butterfly valve is configured to control the pressure in the processing container by changing the inclination angle of the valve body based on a result of detecting the pressure in the processing container.
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