Invention Publication
- Patent Title: SHAPE MEASURING DEVICE
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Application No.: US18277839Application Date: 2022-01-13
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Publication No.: US20240060772A1Publication Date: 2024-02-22
- Inventor: Keisuke UCHIDA , Munenori TAKUMI , Naoaki KATO
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu-shi, Shizuoka
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu-shi, Shizuoka
- Priority: JP 21035091 2021.03.05
- International Application: PCT/JP2022/000921 2022.01.13
- Date entered country: 2023-08-18
- Main IPC: G01B11/26
- IPC: G01B11/26

Abstract:
A shape measurement apparatus includes a light source, an irradiation optical system, an imaging optical system, a spatial light modulator, a focusing optical system, a linear sensor, and a processing unit. The irradiation optical system forms the light into a line shape and irradiates an object. The imaging optical system forms an image of the light reflected by the object. The spatial light modulator, in which a one-dimensional intensity modulation pattern is set on a light modulation plane, spatially intensity-modulates and outputs the light. The focusing optical system focuses the light output from the spatial light modulator in a line shape. The linear sensor receives the light focused in the line shape by pixels. The processing unit performs analysis by the compressive sensing technique for each of the pixels based on the intensity modulation pattern and an output signal from the linear sensor.
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