Invention Publication
- Patent Title: SURFACE ACOUSTIC WAVE DEVICE
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Application No.: US18499222Application Date: 2023-11-01
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Publication No.: US20240063774A1Publication Date: 2024-02-22
- Inventor: Chen-Hsiao Wang , Kai-Kuang Ho
- Applicant: United Microelectronics Corp.
- Applicant Address: TW Hsinchu
- Assignee: United Microelectronics Corp.
- Current Assignee: United Microelectronics Corp.
- Current Assignee Address: TW Hsinchu
- Priority: CN 2011328874.1 2020.11.24
- The original application number of the division: US17137051 2020.12.29
- Main IPC: H03H9/10
- IPC: H03H9/10 ; H03H3/08 ; H03H9/25 ; H03H9/02 ; H10N30/02 ; H10N30/88

Abstract:
A surface acoustic wave (SAW) device including a substrate is provided. Multiple surface acoustic wave elements are disposed on the substrate. A conductive surrounding structure includes: a wall part, disposed on the substrate and surrounding the surface acoustic wave elements; and a lateral layer part, disposed on the wall part. The lateral layer part has an opening above the surface acoustic wave elements. A cap layer covers the lateral layer part and closes the opening.
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