Top electrodes and dielectric spacer layers for bulk acoustic wave resonators

    公开(公告)号:US12081194B2

    公开(公告)日:2024-09-03

    申请号:US18192312

    申请日:2023-03-29

    申请人: Qorvo US, Inc.

    摘要: Bulk acoustic wave (BAW) resonators and particularly top electrodes with step arrangements for BAW resonators are disclosed. Top electrodes on piezoelectric layers are disclosed that include a border (BO) region with a dual-step arrangement where an inner step and an outer step are formed with increasing heights toward peripheral edges of the top electrode. Dielectric spacer layers may be provided between the outer steps and the piezoelectric layer. Passivation layers are disclosed that extend over the top electrode either to peripheral edges of the piezoelectric layer or that are inset from peripheral edges of the piezoelectric layer. Piezoelectric layers may be arranged with reduced thickness portions in areas that are uncovered by top electrodes. BAW resonators as disclosed herein are provided with high quality factors and suppression of spurious modes while also providing weakened BO modes that are shifted farther away from passbands of such BAW resonators.

    Laminated piezoelectric element and electroacoustic transducer

    公开(公告)号:US12075211B2

    公开(公告)日:2024-08-27

    申请号:US17946825

    申请日:2022-09-16

    摘要: Provided are a laminated piezoelectric element and an electroacoustic transducer capable of obtaining high piezoelectric characteristics and easily ensuring an electric contact to an electrode layer. A plurality of layers of piezoelectric films, each of which is formed by laminating a first protective layer, a first electrode layer, a piezoelectric layer, a second electrode layer, and a second protective layer in this order, are laminated. Each of the piezoelectric layers is polarized in a thickness direction. In each of the piezoelectric films, the first electrode is disposed on an upstream side in a polarization direction of the piezoelectric layer, and the second electrode is disposed on a downstream side. Each of the plurality of piezoelectric films has a cemented portion which is cemented to an adjacent piezoelectric film and a protruding portion which is not cemented to the adjacent piezoelectric film and in which at least the first electrode layer and the first protective layer or the second electrode layer and the second protective layer protrude from the cemented portion toward the outside in a plane direction. At the protruding portion of each of the piezoelectric films, at least one of a first contact, to which the first electrode layers of the piezoelectric films are electrically connected to each other, or a second contact, to which the second electrode layers of the piezoelectric films are electrically connected to each other, is formed.

    PIEZOELECTRIC FILM AND LAMINATED PIEZOELECTRIC ELEMENT

    公开(公告)号:US20240260476A1

    公开(公告)日:2024-08-01

    申请号:US18595568

    申请日:2024-03-05

    发明人: Tetsu MIYOSHI

    摘要: An object of the present invention is to provide a piezoelectric film and a laminated piezoelectric element, in which, in a piezoelectric film including electrode layers and protective layers on both surfaces of a piezoelectric layer containing piezoelectric particles in a matrix containing a polymer material, changes in mechanical properties and electrical properties due to a humidity of an external environment can be reduced. The piezoelectric film includes a piezoelectric layer containing piezoelectric particles in a matrix containing a polymer material, electrode layers provided on both surfaces of the piezoelectric layer, and a protective layer provided on a surface of the electrode layer opposite to the piezoelectric layer, in which the protective layer has a resin substrate and at least one inorganic layer provided on the resin substrate, and a water vapor transmission rate of the piezoelectric film is 1×10−4 g/(m2×day) or less.