Invention Publication
- Patent Title: DEPOSITION APPARATUS
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Application No.: US18218485Application Date: 2023-07-05
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Publication No.: US20240068082A1Publication Date: 2024-02-29
- Inventor: JUNHYEUK KO , MINGOO KANG , EUIGYU KIM , JONGBUM KIM , Sukha RYU , SANG MIN YI , KYUNGHOON CHUNG
- Applicant: Samsung Display Co., LTD.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., LTD.
- Current Assignee: Samsung Display Co., LTD.
- Current Assignee Address: KR Yongin-si
- Priority: KR 20220109212 2022.08.30
- Main IPC: C23C14/04
- IPC: C23C14/04 ; H10K71/10

Abstract:
A deposition apparatus includes a mask, a mask frame, a stage disposed on a rear surface of the mask frame, and first to third external force applying parts disposed on the stage. Each of the first portion and the second portion includes a support and a driving part which moves the support. The first to third external force applying parts applies external force to the mask frame to control a shape of the mask frame.
Information query
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