Invention Publication
- Patent Title: DATA FILTER FOR SCANNING METROLOGY
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Application No.: US18280266Application Date: 2022-02-21
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Publication No.: US20240069454A1Publication Date: 2024-02-29
- Inventor: Cristina CARESIO , Tabitha Wangari KINYANJUI , Andrey Valerievich ROGACHEVSKIY , Bastiaan Andreas Wilhelmus Hubertus KNARREN , Raymund CENTENO , Jan Arie DEN BOER , Viktor TROGRLIC
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Priority: EP 160810.4 2021.03.04 EP 188528.0 2021.07.29
- International Application: PCT/EP2022/054191 2022.02.21
- Date entered country: 2023-09-04
- Main IPC: G03F9/00
- IPC: G03F9/00

Abstract:
A method of processing a data set including equispaced and/or non-equispaced data samples is disclosed. The method includes filtering of the data, wherein a kernel defined by a probability density function is convoluted over samples in the data set to perform a weighted average of the samples at a plurality of positions across the data set, and wherein a first order regression is applied to the filtered data to provide a processed data output.
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