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公开(公告)号：US20230244153A1
公开(公告)日：2023-08-03
申请号：US18000299
申请日：2021-04-19
发明人： Andrey Valerievich ROGACHEVSKIY , Bastiaan Andreas Wilhelmus Hubertus KNARREN , Doru Cristian TORUMBA , Arjan GIJSBERTSEN , Cristina CARESIO , Raymund CENTENO , Tabitha Wangari KINYANJUI , Jan Arie DEN BOER
CPC分类号： G03F9/7034 , G06T7/246 , G01C5/00 , G03F9/7046 , G03F9/7092 , G03F9/7026 , G03F9/7019
摘要： The present invention provides a method for calculating a corrected substrate height map of a first substrate using a height level sensor. The method comprises: sampling the first substrate by means of the height level sensor with the first substrate moving with a first velocity, wherein the first velocity is a first at least partially non-constant velocity of the first substrate with respect to the height level sensor, to generate a first height level data, generating a first height map based on the first height level data, and calculating a corrected substrate height map by subtracting a correction map from the first height map, wherein the correction map is calculated from the difference between a first velocity height map and a second velocity height map.
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公开(公告)号：US20240069454A1
公开(公告)日：2024-02-29
申请号：US18280266
申请日：2022-02-21
发明人： Cristina CARESIO , Tabitha Wangari KINYANJUI , Andrey Valerievich ROGACHEVSKIY , Bastiaan Andreas Wilhelmus Hubertus KNARREN , Raymund CENTENO , Jan Arie DEN BOER , Viktor TROGRLIC
IPC分类号： G03F9/00
CPC分类号： G03F9/7034 , G03F9/7092
摘要： A method of processing a data set including equispaced and/or non-equispaced data samples is disclosed. The method includes filtering of the data, wherein a kernel defined by a probability density function is convoluted over samples in the data set to perform a weighted average of the samples at a plurality of positions across the data set, and wherein a first order regression is applied to the filtered data to provide a processed data output.
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