- 专利标题: LATERALLY UNCONFINED STRUCTURE
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申请号: US18342515申请日: 2023-06-27
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公开(公告)号: US20240071915A1公开(公告)日: 2024-02-29
- 发明人: Cyprian Emeka UZOH
- 申请人: ADEIA SEMICONDUCTOR BONDING TECHNOLOGIES INC.
- 申请人地址: US CA San Jose
- 专利权人: ADEIA SEMICONDUCTOR BONDING TECHNOLOGIES INC.
- 当前专利权人: ADEIA SEMICONDUCTOR BONDING TECHNOLOGIES INC.
- 当前专利权人地址: US CA San Jose
- 主分类号: H01L23/528
- IPC分类号: H01L23/528 ; H01L21/768
摘要:
Techniques are employed to mitigate the anchoring effects of cavity sidewall adhesion on an embedded conductive interconnect structure, and to allow a lower annealing temperature to be used to join opposing conductive interconnect structures. A vertical gap may be disposed between the conductive material of an embedded interconnect structure and the sidewall of the cavity to laterally unpin the conductive structure and allow uniaxial expansion of the conductive material. Additionally or alternatively, one or more vertical gaps may be disposed within the bonding layer, near the embedded interconnect structure to laterally unpin the conductive structure and allow uniaxial expansion of the conductive material.
公开/授权文献
- US12033943B2 Laterally unconfined structure 公开/授权日:2024-07-09
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