Invention Publication
- Patent Title: LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD
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Application No.: US18268652Application Date: 2021-12-20
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Publication No.: US20240082959A1Publication Date: 2024-03-14
- Inventor: Yo SUGIMOTO , Takeshi SAKAMOTO , Takafumi OGIWARA , Naoki UCHIYAMA , Takashi KURITA , Ryo YOSHIMURA
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu-shi, Shizuoka
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu-shi, Shizuoka
- Priority: JP 20217220 2020.12.25
- International Application: PCT/JP2021/047072 2021.12.20
- Date entered country: 2023-06-21
- Main IPC: B23K26/53
- IPC: B23K26/53 ; B23K26/03 ; B23K26/364 ; H01L21/268

Abstract:
A laser processing apparatus includes a support unit that supports a wafer including a plurality of functional elements disposed adjacent to each other via a street, an irradiation unit that irradiates the street with laser light, and a control unit that controls the irradiation unit based on information about the streets so that a first region and a second region of the street are simultaneously irradiated with the laser light, and a power of the laser light for removing a surface layer of the street in the first region is higher than a power for removing the surface layer of the street in the first region. The information about the street includes information that a processing threshold value indicating a difficulty of laser processing in the first region is lower than a processing threshold value in the second region.
Information query
IPC分类: