Invention Publication
- Patent Title: CHIP PICK-UP HEAD, AND CHIP DETACHMENT APPARATUS AND METHOD USING THE PICK-UP HEAD
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Application No.: US18318239Application Date: 2023-05-16
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Publication No.: US20240087923A1Publication Date: 2024-03-14
- Inventor: Minsung KIM , Youngsoo LEE
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR SUWON-SI
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR SUWON-SI
- Priority: KR 20220115806 2022.09.14
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/683

Abstract:
A chip pick-up head includes a collet in contact with an upper surface of a chip of a diced wafer. The chip pick-up head detaches and picks up the chip from an adhesive film. The chip pick-up head further includes a head part coupled to the collet, a vibration transfer rod coupled to the head part and configured to transfer a vibration to the head part and the collet, and a vibration generator coupled to the vibration transfer rod and configured to generate the vibration.
Information query
IPC分类: