Invention Publication
- Patent Title: SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
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Application No.: US18176557Application Date: 2023-03-01
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Publication No.: US20240090239A1Publication Date: 2024-03-14
- Inventor: Kiichi TACHI , Ryota NIHEI , Yoshikazu HOSOMURA
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Priority: JP 22146356 2022.09.14
- Main IPC: H10B80/00
- IPC: H10B80/00 ; H01L23/00 ; H01L23/50

Abstract:
A semiconductor device includes a metal layer disposed above a transistor on a first substrate. The metal layer includes a first region extending in a first direction and a second region that has a width in the first direction smaller than the first region and protrudes from the first region in a second direction, and has a first corner portion having an angle larger than 180° as viewed in a third direction between a proximal end portion of the second region and the first region. The metal layer includes a first portion that is disposed within the first region and has a lower surface at a first height, and a second portion that is disposed within the second region and has a lower surface at a second height lower than the first height. A step present at a boundary between the first portion and the second portion is disposed away from an edge of the second region at a first position near the first corner portion in the second direction and adjacent to the edge of the second region at a second position away from the first corner portion than the first position.
Information query