- 专利标题: RESIST UNDERLAYER FILM FORMATION COMPOSITION
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申请号: US18268800申请日: 2021-12-16
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公开(公告)号: US20240103369A1公开(公告)日: 2024-03-28
- 发明人: Masahisa ENDO , Hayato HATTORI , Yuki MITSUTAKE , Hirokazu NISHIMAKI
- 申请人: NISSAN CHEMICAL CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: NISSAN CHEMICAL CORPORATION
- 当前专利权人: NISSAN CHEMICAL CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP 20211449 2020.12.21
- 国际申请: PCT/JP2021/046575 2021.12.16
- 进入国家日期: 2023-06-21
- 主分类号: G03F7/039
- IPC分类号: G03F7/039 ; G03F7/038 ; G03F7/16
摘要:
A resist underlayer film-forming composition that exhibits a high etching resistance, a favorable dry etching rate ratio and optical constant, and can form a film exhibiting a good coatability even to a so-called uneven substrate, providing a small difference in film thickness after embedding, and having planarity and a superior hardness; a resist underlayer film formed from the resist underlayer film-forming composition; and a method of producing a semiconductor device. The composition including a reaction product between a compound of the following Formula (1) or (2) and a compound of the following Formula (3), and a solvent:
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