Invention Publication
- Patent Title: SAMPLE HOLDER OF TRANSMISSION ELECTRON MICROSCOPE AND SEMICONDUCTOR DEVICE INSPECTION METHOD USING THE SAMPLE HOLDER
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Application No.: US18202155Application Date: 2023-05-25
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Publication No.: US20240105417A1Publication Date: 2024-03-28
- Inventor: Yeoseon Choi , Donghoon Kwon
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR 20220123650 2022.09.28
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/26
Abstract:
A sample holder includes a head, a first holding plate extending in a first direction from one surface of the head and including at least one first sample hole configured to accommodate at least one first sample and a first main surface configured such that the at least one first sample accommodated in the at least one first sample hole is exposed at the first main surface, and a second holding plate extending in the first direction from the one surface of the head and including at least one second sample hole configured to accommodate at least one second sample and a second main surface configured such that the at least one second sample accommodated in the at least one second sample hole is exposed at the second main surface, wherein a direction perpendicular to the first main surface of the first holding plate differs from a direction perpendicular to the second main surface of the second holding plate.
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