发明公开
- 专利标题: AI WIRING MATERIAL
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申请号: US18275599申请日: 2022-01-31
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公开(公告)号: US20240110262A1公开(公告)日: 2024-04-04
- 发明人: Tomohiro UNO , Yuya SUTO , Tetsuya OYAMADA , Daizo ODA , Yuto KURIHARA , Motoki ETO
- 申请人: NIPPON MICROMETAL CORPORATION , NIPPON STEEL Chemical & Material Co., Ltd.
- 申请人地址: JP Saitama
- 专利权人: NIPPON MICROMETAL CORPORATION,NIPPON STEEL Chemical & Material Co., Ltd.
- 当前专利权人: NIPPON MICROMETAL CORPORATION,NIPPON STEEL Chemical & Material Co., Ltd.
- 当前专利权人地址: JP Saitama
- 优先权: JP 21017063 2021.02.05
- 国际申请: PCT/JP2022/003584 2022.01.31
- 进入国家日期: 2023-08-02
- 主分类号: C22C21/14
- IPC分类号: C22C21/14 ; C22C1/02 ; C22C21/00 ; C22C21/02 ; C22C21/08 ; C22C21/16 ; C22F1/043 ; C22F1/047 ; C22F1/057 ; H01L23/00
摘要:
There is provided an Al wiring material which can achieve sufficient bond reliability of bonded parts in a high-temperature environment at the time when a semiconductor device operates. The Al wiring material containing one or more of Pd and Pt so as to satisfy
3≤x1a≤90 or 10≤x1b≤250, and
3≤(x1a+x1b)≤300,
where x1a and x1b are respectively a content of Pd [mass ppm] and a content of Pt [mass ppm],
with the balance comprising Al, and
an average crystal grain diameter on a cross-section perpendicular to a longitudinal direction of the Al wiring material is 3 to 35 μm.
3≤x1a≤90 or 10≤x1b≤250, and
3≤(x1a+x1b)≤300,
where x1a and x1b are respectively a content of Pd [mass ppm] and a content of Pt [mass ppm],
with the balance comprising Al, and
an average crystal grain diameter on a cross-section perpendicular to a longitudinal direction of the Al wiring material is 3 to 35 μm.
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