Invention Publication
- Patent Title: REMOTE CONTROL DEVICES FOR PROBE SYSTEMS, PROBE SYSTEMS THAT INCLUDE THE REMOTE CONTROL DEVICES, AND METHODS OF REMOTELY OPERATING A MOTORIZED POSITIONER OF A PROBE SYSTEM
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Application No.: US18468568Application Date: 2023-09-15
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Publication No.: US20240110942A1Publication Date: 2024-04-04
- Inventor: Benjamin E. Waters
- Applicant: FormFactor, Inc.
- Applicant Address: US CA Livermore
- Assignee: FormFactor, Inc.
- Current Assignee: FormFactor, Inc.
- Current Assignee Address: US CA Livermore
- Main IPC: G01R1/067
- IPC: G01R1/067 ; G01R31/28

Abstract:
Remote control devices for motorized positioners of probe systems, probe systems that include the remote control devices, and methods of remotely operating a motorized positioner of a probe system are disclosed herein. The remote control devices include a first rotary encoder, a second rotary encoder, a third rotary encoder, and a remote processing device. The probe systems include a chuck, a signal generation and analysis assembly, a probe, a motorized positioner, a local processing device, and the remote control device. The methods include generating a control signal utilizing the remote control device and transmitting the control signal to the probe system. The methods also include translating a probe of the probe system relative to a support surface of the probe system. The translating is based, at least in part, on the control signal.
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