• Patent Title: REMOTE CONTROL DEVICES FOR PROBE SYSTEMS, PROBE SYSTEMS THAT INCLUDE THE REMOTE CONTROL DEVICES, AND METHODS OF REMOTELY OPERATING A MOTORIZED POSITIONER OF A PROBE SYSTEM
  • Application No.: US18468568
    Application Date: 2023-09-15
  • Publication No.: US20240110942A1
    Publication Date: 2024-04-04
  • Inventor: Benjamin E. Waters
  • Applicant: FormFactor, Inc.
  • Applicant Address: US CA Livermore
  • Assignee: FormFactor, Inc.
  • Current Assignee: FormFactor, Inc.
  • Current Assignee Address: US CA Livermore
  • Main IPC: G01R1/067
  • IPC: G01R1/067 G01R31/28
REMOTE CONTROL DEVICES FOR PROBE SYSTEMS, PROBE SYSTEMS THAT INCLUDE THE REMOTE CONTROL DEVICES, AND METHODS OF REMOTELY OPERATING A MOTORIZED POSITIONER OF A PROBE SYSTEM
Abstract:
Remote control devices for motorized positioners of probe systems, probe systems that include the remote control devices, and methods of remotely operating a motorized positioner of a probe system are disclosed herein. The remote control devices include a first rotary encoder, a second rotary encoder, a third rotary encoder, and a remote processing device. The probe systems include a chuck, a signal generation and analysis assembly, a probe, a motorized positioner, a local processing device, and the remote control device. The methods include generating a control signal utilizing the remote control device and transmitting the control signal to the probe system. The methods also include translating a probe of the probe system relative to a support surface of the probe system. The translating is based, at least in part, on the control signal.
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