Invention Publication
- Patent Title: SEMICONDUCTOR MEMORY DEVICE, METHOD FOR FABRICATING THE SAME AND ELECTRONIC SYSTEM INCLUDING THE SAME
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Application No.: US18471746Application Date: 2023-09-21
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Publication No.: US20240120007A1Publication Date: 2024-04-11
- Inventor: Chul Min CHOI , Chang Hoon BYEON , Sun Il SHIM
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR 20220129801 2022.10.11 KR 20230049515 2023.04.14
- Main IPC: G11C16/04
- IPC: G11C16/04 ; H01L25/065 ; H10B41/10 ; H10B41/27 ; H10B41/35 ; H10B41/40 ; H10B43/10 ; H10B43/27 ; H10B43/35 ; H10B43/40 ; H10B80/00

Abstract:
A semiconductor memory device may include a cell substrate; a mold structure including a plurality of gate electrodes stacked on the cell substrate; a channel structure penetrating the mold structure; a string select line on the mold structure; a string select channel structure penetrating the string select line and contacting the channel structure; an anti-arcing contact penetrating the mold structure; an insulating pattern between the anti-arcing contact and the plurality of gate electrodes; and an anti-arcing insulating pattern penetrating the string select line to be in contact with the anti-arcing contact.
Information query