SUCTION GRIPPING DEVICE AND METHOD FOR RECEIVING AND STORING FLAT FLEXIBLE SUBSTRATES
摘要:
A suction gripping device for picking up a plurality of substrates which are flat and flexible includes: a base body, which defines a plane; at least one gas suction vacuum module which is arranged on the base body and has at least one gas suction opening configured for withdrawing gas by suction and for generating a first vacuum so as to suction a respective one of the plurality of substrates against the suction gripping device; and at least one gas ejection vacuum module which is arranged on the base body and has a gas ejection opening configured for ejecting gas and for generating a second vacuum so as to suction the respective one of the plurality of substrates against the suction gripping device.
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