Invention Publication
- Patent Title: MANUFACTURING METHOD OF PHOTOELECTRIC CONVERSION PANEL, MANUFACTURING METHOD OF X-RAY IMAGING PANEL, AND PHOTOELECTRIC CONVERSION PANEL
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Application No.: US18237153Application Date: 2023-08-23
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Publication No.: US20240128298A1Publication Date: 2024-04-18
- Inventor: Rikiya TAKITA
- Applicant: Sharp Display Technology Corporation
- Applicant Address: JP Kameyama City
- Assignee: Sharp Display Technology Corporation
- Current Assignee: Sharp Display Technology Corporation
- Current Assignee Address: JP Kameyama City
- Priority: JP 22165033 2022.10.13
- Main IPC: H01L27/146
- IPC: H01L27/146 ; G01T1/20
Abstract:
Provided is a manufacturing method of a photoelectric conversion panel including forming a photodiode in a frame region, forming a first wiring line overlapping a first portion in a plan view, the first wiring line connecting a TFT or a photodiode and the photodiode, forming a second wiring line not overlapping the first portion in a plan view and overlapping a second portion in the plan view, and forming a third portion between the first portion and the second portion. The third portion is a portion not overlapping the first wiring line and the second wiring line in a plan view. Thereafter, the manufacturing method of a photoelectric conversion panel includes dividing the photodiode and the substrate at the third portion.
Information query
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