Invention Publication
- Patent Title: DEPOSITION SOURCE AND DEPOSITION APPARATUS INCLUDING THE SAME
-
Application No.: US18366820Application Date: 2023-08-08
-
Publication No.: US20240141489A1Publication Date: 2024-05-02
- Inventor: JAEWAN SEOL , INTAEK YOON , JONGHYUN CHOI
- Applicant: Samsung Display Co., LTD.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., LTD.
- Current Assignee: Samsung Display Co., LTD.
- Current Assignee Address: KR Yongin-si
- Priority: KR 20220140398 2022.10.27
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C23C14/24

Abstract:
A deposition source includes a nozzle member, a vaporizing member, and a connecting member. The nozzle member includes a body portion including at least one first hole formed in a slot hole, a plurality of nozzles coupled to a first surface of the body portion and that eject a deposition material to an outside, and a crucible including at least one second hole overlapping the first hole and coupled to a second surface of the body portion by a fastening member inserted into the first hole and the second hole. The fastening member includes a bolt, a nut, and a washer. The vaporizing member is spaced apart from the nozzle member and stores the deposition material; and the connecting member connects the nozzle member and the vaporizing member. The deposition material moves through the connecting member.
Information query
IPC分类: