公开(公告)号：US20240141475A1

公开(公告)日：2024-05-02

申请号：US18230860

申请日：2023-08-07

Applicant: Samsung Display Co., LTD.

Inventor： JAEWAN SEOL ,  MIN-GYU SEO ,  INTAEK YOON ,  JONGHYUN CHOI

IPC: C23C14/26 ,  C23C14/04

CPC classification number: C23C14/26 ,  C23C14/042

Abstract: A deposition apparatus includes a chamber providing an inner space and a deposition source including an accommodation module accommodating a deposition material and a heater module providing heat to the deposition material. The deposition source is accommodated in the inner space to provide the deposition material. The heater module includes a first heater cover including a surface facing the accommodation module, including an insulating material, and provided with a first through hole, a second heater cover including an insulating material and provided with a second through hole, a heater disposed between the first and second heater covers, a fixing frame coupled with the second heater cover to fix the second heater cover and provided with a fastening hole, a coupling member inserted into the first and second through holes and the fastening hole, and a shielding cover covering an end of the coupling member and including an insulating material.

公开(公告)号：US20240141489A1

公开(公告)日：2024-05-02

申请号：US18366820

申请日：2023-08-08

Applicant: Samsung Display Co., LTD.

Inventor： JAEWAN SEOL ,  INTAEK YOON ,  JONGHYUN CHOI

IPC: C23C16/455 ,  C23C14/24

CPC classification number: C23C16/45578 ,  C23C14/243 ,  C23C16/4557

Abstract: A deposition source includes a nozzle member, a vaporizing member, and a connecting member. The nozzle member includes a body portion including at least one first hole formed in a slot hole, a plurality of nozzles coupled to a first surface of the body portion and that eject a deposition material to an outside, and a crucible including at least one second hole overlapping the first hole and coupled to a second surface of the body portion by a fastening member inserted into the first hole and the second hole. The fastening member includes a bolt, a nut, and a washer. The vaporizing member is spaced apart from the nozzle member and stores the deposition material; and the connecting member connects the nozzle member and the vaporizing member. The deposition material moves through the connecting member.