Invention Publication
- Patent Title: PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
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Application No.: US18412218Application Date: 2024-01-12
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Publication No.: US20240153742A1Publication Date: 2024-05-09
- Inventor: Gen TAMAMUSHI
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Priority: JP 21116582 2021.07.14
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
A plasma processing method according to the present disclosure includes disposing a substrate on a substrate support, supplying, into a chamber, a processing gas for processing the substrate, generating, in the chamber, a plasma from the processing gas by using a first RF signal and a second RF signal, and applying a bias signal to the substrate support, and generating the plasma includes superimposing the second RF signal on the first RF signal based on a timing when the bias signal is applied to the substrate support.
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