- 专利标题: METHOD FOR FACILITATING DEMOLDING UPON PATTERN TRANSFER
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申请号: US18549312申请日: 2022-03-05
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公开(公告)号: US20240165870A1公开(公告)日: 2024-05-23
- 发明人: Prasanna Venkatesh KRISHNAN
- 申请人: OBDUCAT AB
- 申请人地址: SE Lund
- 专利权人: OBDUCAT AB
- 当前专利权人: OBDUCAT AB
- 当前专利权人地址: SE Lund
- 优先权: EP 161882.2 2021.03.10
- 国际申请: PCT/EP2022/055653 2022.03.05
- 进入国家日期: 2023-09-06
- 主分类号: B29C59/00
- IPC分类号: B29C59/00 ; B29C59/02 ; B29K23/00 ; B29K25/00 ; B29K67/00 ; B29K69/00 ; B29K105/00 ; G03F7/00
摘要:
A method for facilitating demolding of a substrate from an imprint template, the method comprising: providing (S510) the template and the substrate in a sandwich arrangement with a structured surface of the template in contact with a target surface of the substrate; applying heat (S520) to soften a molding layer on the target surface, wherein said molding layer is a thermoplastic material having a minimum glass transition temperature, Tg>50° C. and Young's modulus>1000 MPa, and wherein the molding layer is heated above Tg; pressing (S530) the sandwich arrangement together to imprint a pattern of the structured surface into the heated molding layer; submerging (S550) the sandwich arrangement in a cooling liquid to harden the molding layer; and separating (S560) the template from the patterned substrate.
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