- 专利标题: Module for exchanging an interface unit, test system with such a module, method for testing semiconductor elements and for exchanging interface units
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申请号: US18512234申请日: 2023-11-17
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公开(公告)号: US20240168087A1公开(公告)日: 2024-05-23
- 发明人: Stefan Thurmaier
- 申请人: Turbodynamics GmbH
- 申请人地址: DE Stephanskirchen
- 专利权人: Turbodynamics GmbH
- 当前专利权人: Turbodynamics GmbH
- 当前专利权人地址: DE Stephanskirchen
- 优先权: DE 2022130631.3 2022.11.18 DE 2023131555.2 2023.11.13
- 主分类号: G01R31/28
- IPC分类号: G01R31/28
摘要:
The invention relates to a module for exchanging an interface unit in a test system with a handling unit and test unit for testing semiconductor elements. The module has a base element which is or can be attached to the test system, a holder for holding an interface unit, and guide elements which connect the holder to the base element. The guide elements are designed to guide the holder relative to the base element between the insertion position, in which the holder is located in the test system between the test unit and the handling unit, and the removal position, in which the holder is located outside an area between the test unit and the handling unit for exchanging the interface unit. Furthermore, at least one docking unit is provided, each with a docking element and a docking counter-element for coupling the holder to the base element in such a way that the coupling provides a rigid connection at least perpendicular to an interface plane. The docking element or the docking counter-element is attached to the holder and the docking counter-element or the docking element is attached to the base element, and the docking unit is designed for mechanically connecting and disconnecting the docking element to the docking mating element. The invention also relates to a test system with the module, methods for testing semiconductor elements and methods for exchanging interface units.
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