Invention Publication
- Patent Title: ASSEMBLY FOR SEPARATING RADIATION IN THE FAR FIELD
-
Application No.: US18277188Application Date: 2022-01-12
-
Publication No.: US20240168392A1Publication Date: 2024-05-23
- Inventor: Petrus Wilhelmus SMORENBURG , Johan REININK , Marinus Petrus REIJNDERS , Han-Kwang NIENHUYS , David O'DWYER , Sander Bas ROOBOL , Christina Lynn PORTER , Stephen EDWARD
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Priority: EP 15762208 2021.02.17 EP 17628.9 2021.05.27
- International Application: PCT/EP2022/050490 2022.01.12
- Date entered country: 2023-08-14
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G21K1/10

Abstract:
An assembly and method for separating first radiation and second radiation in the far field, wherein the first radiation and the second radiation have non-overlapping wavelengths, The assembly comprises a capillary structure, wherein the first radiation and the second radiation propagate coaxially along at least a portion of the capillary structure, and an optical structure configured to control the spatial distribution of the first radiation outside of the capillary structure, through interference, such that the intensity of the first radiation in the far field is reduced along an optical axis of the second radiation.
Information query