- 专利标题: PHOTOMASK, DISPLAY DEVICE, AND MANUFACTURING METHOD THEREOF
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申请号: US18422006申请日: 2024-01-25
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公开(公告)号: US20240170504A1公开(公告)日: 2024-05-23
- 发明人: Dong Hee SHIN , Geun Ho LEE , Yong Hee LEE
- 申请人: Samsung Display Co., Ltd.
- 申请人地址: KR Yongin-Si
- 专利权人: Samsung Display Co., Ltd.
- 当前专利权人: Samsung Display Co., Ltd.
- 当前专利权人地址: KR Yongin-Si
- 优先权: KR 20200036267 2020.03.25
- 分案原申请号: US17125836 2020.12.17
- 主分类号: H01L27/12
- IPC分类号: H01L27/12 ; G03F1/42 ; G03F1/70 ; G03F7/00 ; G03F7/20 ; H01L23/544
摘要:
A photomask according to an exemplary embodiment includes: a mask substrate; and a first test pattern and a second test pattern disposed along a first edge of the mask substrate, wherein the first test pattern has a first outer shape and a first inner shape, the second test pattern has a second outer shape, and the second outer shape of the second test pattern is larger than the first inner shape of the first test pattern and smaller than the first outer shape of the first test pattern.
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