Invention Publication
- Patent Title: METHOD FOR DETERMINING ANTENNA RULE FOR RADIO-FREQUENCY DEVICE
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Application No.: US18108024Application Date: 2023-02-10
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Publication No.: US20240178137A1Publication Date: 2024-05-30
- Inventor: XINGXING CHEN , Ching-Yang Wen , Purakh Raj Verma
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu City
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu City
- Priority: CN 2211511074.2 2022.11.29
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H01L23/522 ; H01Q1/38

Abstract:
A method for determining antenna rule for a radio-frequency (RF) device includes the steps of forming a gate structure on a substrate, forming a source/drain region adjacent to the gate structure, forming a first metal routing on the source/drain region, and then forming a second metal routing on the gate structure. Preferably, a sum of an area of the first metal routing and an area of the second metal routing divided by an area of the gate structure is less than a ratio.
Information query
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